Our Laboratories

Two complementary facilities support research and training.

PLD Laboratory

  • Integrated PLD system (MBE-2300 class)
  • Laser: excimer/Nd:YAG (configure per setup)
  • Base pressure: < 5×10⁻⁶ mbar
  • Substrate heating: RT–800 °C
  • Target carousel: 6-position
View Instruments

CVD Laboratory

  • Modular chamber + optics bench
  • Process gases: O₂, Ar, N₂ (MFC control)
  • Flexible target/substrate spacing
  • Rapid iteration for new materials
Metrology